The Setra 227 is an ultra high purity pressure transducer, built for high-density modular “block” gas bars and panels used in 300mm semiconductor tools. Its compact 1-1/8″ body saves valuable panel space, and its small internal sensor chamber is designed to purge quickly and cleanly, which matters a lot in a gas delivery system where any trapped volume is a contamination risk.
All wetted parts are 316L VIM/VAR stainless steel, surface passivated to 5 Ra (maximum 7 Ra) to keep the gas path clean. Pressure ranges run from 0-25 PSI up to 0-3000 PSI (bar and torr options also available), with accuracy of ±1.0% reading or ±0.25% FS, non-linearity of ±0.15% FS and hysteresis of 0.20% FS. Output is 0-5V, 0-10V, 0.2-5.2V, 0.2-10.2V, or 4-20mA, and connection is via VCR fitting with a 6-foot multiconductor cable, 4-pin bayonet, or 9/15-pin D-sub connector depending on how it is ordered. It is leak tested to an ammonia leakage level of 1×10-9 ATM.CC/sec.
From our experience, this is specified for high purity gas delivery systems and semiconductor process tools where the process gas itself cannot tolerate contamination. Before we quote this, we would normally check the pressure range, connector type, and mounting style needed, since the 227 is built and calibrated to order rather than sold off the shelf. Hope this helps.
